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半导体设备是半导体产业的先导、基础产业,具有技术壁垒高、研发周期长、客户验证壁垒高等特点。随着国产设备商技术与服务的不断突破与成熟,且进口设备成本增加50%+,设备的国产化率有望加速提升。

半导体设备定义

半导体设备涵盖晶圆制造、光刻、刻蚀、薄膜沉积、掺杂、表面处理及封装测试等关键环节,各设备分工协作完成芯片生产。例如,光刻机实现电路图案转移,刻蚀机精准雕刻结构,离子注入机调控电学性能,CMP确保表面平整,最终封装测试设备保障芯片可靠性。这些高精密设备的技术突破是半导体产业发展的核心驱动力,直接影响芯片性能与量产效率。

资料来源:中商产业研究院整理

半导体设备行业发展政策

近年来,中央及地方政府对半导体行业给予了高度重视和大力支持,出台了一系列扶持政策,相关政策和法规为半导体及行业及专用设备行业提供了资金、税收、技术和人才等多方面的有力支持,为国产半导体设备企业营造了良好的经营环境,大力促进了国内半导体及其专用设备产业发展,提升国产半导体设备企业的竞争力。

资料来源:中商产业研究院整理

半导体设备行业发展现状

1.全球销售额

SEMI数据显示,2024年全球半导体设备销售额为1090亿美元,其中前三季度全球半导体设备市场增长尤为强劲,销售额同比增长18.7%,环比增长13.4%。随着AI浪潮的兴起,以及下游消费电子、物联网、工业互联、汽车电子等领域同步快速发展,中商产业研究院分析师预测,2025年全球半导体设备销售额将达1231亿美元。

数据来源:SEMI、中商产业研究院整理

2.全球区域分布情况

SEAJ数据显示,2024年全球半导体设备市场中,中国大陆占比最多,达42.3%。其次分别为韩国、中国台湾、北美,占比分别为17.5%、14.1%、11.7%。

数据来源:SEAJ、中商产业研究院整理

3.中国市场规模

目前,人工智能的发展势头正盛,带动半导体行业规模迅速扩大,半导体设备需求也将大幅增长。中商产业研究院发布的《2025-2030年中国半导体设备行业市场供需趋势及发展战略研究预测报告》显示,2023年中国半导体设备市场规模约为2190.24亿元,占全球市场份额的35%,2024年约为2230亿元。中商产业研究院分析师预测,2025年中国半导体设备市场规模将达2300亿元。

数据来源:SEMI、中商产业研究院整理

4.投融资情况

目前,半导体设备投资市场火热,近几年一直维持在较高水平。IT桔子数据显示,2025年前三季度,半导体设备已披露投资事件共58起,已披露融资金额约41.84亿元。

数据来源:IT桔子、中商产业研究院整理

5.全球企业排名

2024年全球半导体设备厂商市场规模Top10与2023年的Top10设备商相同,前五排名无变化,荷兰公司阿斯麦2024年营收超300亿美元,排名首位;美国应用材料2024年营收约250亿美元,排名第二;LAM、TEL、美国科磊(KLA)分别排名第三、第四和第五;从营收金额来看,2024年前五大设备商的半导体业务的营收合计近900亿美元,约占比Top10营收合计的85%。

资料来源:CINNOResearch、中商产业研究院整理

半导体设备行业重点企业

1.北方华创

北方华创科技集团股份有限公司是中国领先的半导体装备和电子元器件供应商,成立于2001年,由北京七星华创与北方微电子战略重组而来。公司聚焦集成电路、先进封装、光伏等领域,核心产品包括刻蚀机、薄膜沉积设备(PVD/CVD)、清洗机等关键设备,技术覆盖14nm及以下先进制程,是国内半导体设备品类最全的龙头企业,承担多项国家02专项任务,客户涵盖中芯国际、长江存储等头部厂商。

2024年前三季度实现营业收入203.53亿元,同比增长39.52%;实现归母净利润44.63亿元,同比增长54.75%。2023年主营产品包括电子工艺装备、电子元器件,营收分别占整体的88.82%、11.02%。

数据来源:中商产业研究院整理数据来源:中商产业研究院整理

2.上海微电子

上海微电子装备(集团)股份有限公司(SMEE)成立于2002年,是中国唯一具备前道光刻机研发能力的企业,其主导产品600系列光刻机主要用于90nm及以上制程的集成电路制造,并在后道先进封装光刻机领域占据全球40%市场份额。公司承担国家“02专项”攻关任务,致力于突破DUV和EUV光刻技术,是国产半导体设备自主化战略的核心企业之一。

资料来源:中商产业研究院整理

3.中微公司

中微半导体设备(上海)股份有限公司(688012.SH)成立于2004年,由尹志尧博士创立,专注于刻蚀设备和MOCVD设备的研发。其等离子体刻蚀机已进入台积电5nm生产线,技术达国际领先水平;MOCVD设备全球市占率超60%,主导LED外延片制造市场。中微是首家获台积电认证的国产刻蚀设备商,客户覆盖三星、长江存储等,在介质刻蚀领域打破海外垄断。

2024年前三季度实现营业收入55.07亿元,同比增长36.28%;实现归母净利润9.13亿元,同比下降21.29%。

数据来源:中商产业研究院整理

4.屹唐半导体

北京屹唐半导体科技有限公司成立于2016年,由北京国资主导收购美国MattsonTechnology后整合成立,主营干法去胶、刻蚀、快速退火等设备,其干法去胶设备全球市占率超30%,位居第一,客户包括三星、台积电、长鑫存储等。公司产品覆盖逻辑、存储芯片制造全流程,技术节点延伸至5nm,是国产半导体设备国际化与高端化的标杆企业。

资料来源:中商产业研究院整理

5.华兴源创

苏州华兴源创科技股份有限公司成立于2005年,2019年成为科创板首家上市企业,专注半导体检测设备领域,核心产品包括显示驱动芯片测试机、晶圆光学检测仪等,突破MicroOLED和COF芯片检测技术,客户涵盖苹果、京东方、通富微电等。公司并购韩国欧立通拓展自动化测试业务,在平板显示检测设备市占率国内第一,助力国产半导体检测设备自主化。

2024年前三季度实现营业收入12.76亿元,同比下降4.63%;归母净利润亏损0.51亿元。2023年主营产品包括检测设备、治具及配件,营收分别占整体的69.23%、19.77%。

数据来源:中商产业研究院整理数据来源:中商产业研究院整理

半导体设备行业发展前景

1.政策支持加速核心技术突破

中国半导体设备行业依托国家战略级政策扶持实现关键技术突破,政府通过“国家大基金”三期注资3440亿元,重点支持设备研发与产能扩张,并配套税收优惠、人才引进等政策降低企业研发成本。例如,上海微电子在光刻机领域攻关、中微公司在刻蚀设备领域的突破,均依托政策对“卡脖子”技术的定向扶持。地方政府如上海、北京等地通过专项基金支持设备企业,形成“中央-地方”联动的政策网络,加速国产设备在成熟制程的覆盖与先进制程的突破。

2.产业链协同创新提升整体竞争力

行业竞争力的提升依赖于设计、制造、封测全链条的深度协同与区域产业集群的整合。华为海思与中芯国际联合开发7nm工艺,缩短设备验证周期;上海临港、合肥长鑫等产业集群通过集中资源实现设备、材料与制造端的无缝对接,降低技术转化成本。国产设备在清洗、去胶等环节市占率超50%,并与材料企业形成生态闭环(如沪硅产业300mm硅片良率追平国际水平、安集科技化学抛光液市占率突破15%)。头部企业如北方华创、中微公司通过并购整合技术链,构建“设备-材料-制造”协同生态。

3.技术路径多元化拓展应用场景

行业通过技术创新开辟差异化赛道,分散传统技术路线的风险。在先进制程受限背景下,国内企业转向Chiplet集成、RISC-V架构生态等方向,例如长电科技的CoWoS封装设备通过异构集成提升性能。第三代半导体(碳化硅、氮化镓)和二维芯片制造设备的突破,为汽车电子、AIoT等新兴领域提供国产替代方案。同时,北方华创的离子注入机、中微的亚埃级刻蚀设备在成熟制程中实现规模化应用,形成“成熟制程替代+新兴领域突破”的双轨路径。

以上信息仅供参考,如有遗漏与不足,欢迎指正!

中商产业研究院

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